Tetrakis(dimethylamino)titanium(IV), 99% TDMAT

$608.00

FREE
SHIPPING

100% MONEY
BACK GUARANTEE

ONLINE
SUPPORT 24/7

Available on backorder. No lead time available. Please request a quote.
Sku SC93-2240_25_G
US-Strem
Get Bulk Quote
General Details
CAS # 3275-24-9
SMILES
Chemical Purity
Molecular Formula Ti[N(CH3)2]4
Chemical Formula
Formula Weight 224.20
Reaction
Note
Physical Properties
Purity 99%
Density
Melting Point
Boiling Point
Flash Point -22°F
Vapor Pressure
Surface Area
Pore Volume
Specific Rotation
Shipping & Stability
Safety No
Days to Ship
Store Cold
Dry Ice
Alternative Product for Air Shipment
Export Limitations
Pyrophoric
Hygroscopic
Air Sensitive
Light Sensitive
Heat Sensitive
Moisture Sensitive
Odorous Material

Technical Notes:
1.ALD/CVD precursor mainly used for TiN [1 ,review] and TiO2 based thin film de positions .
References:
1.J.Appl Phys. 2013 113. 021301.
2.Microelectron Eng 2009 86 72
3.J Vac. Sci Tech A 2018 36 06A105
4.Appl Surf Sci 2018 462. 1029
5.J App. Phys. 2007. 102. 083521
6.J Electrochem. Soc. 2008 155. H688.