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Sku SC93-1454_500_G
US-Strem
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Product Information

Product Name
Tetraethoxysilane, min. 98% TEOS
Brand Name
US-Strem
Product Number
93-1454
CAS
78-10-4
Certificate of Analysis (COA)​
COA not found

General Information

PubChem CID
6517
IUPAC Name
tetraethyl silicate
InChI Key
BOTDANWDWHJENH-UHFFFAOYSA-N
SMILES
CCOSi(OCC)(OCC)OCC

Description

Product Introduction

Tetraethoxysilane (CAS No. 78-10-4), also commonly known as Tetraethyl orthosilicate (TEOS), is an important silicon alkoxide and widely used silica precursor, sol-gel reagent, and silicon source.

Its molecular structure contains four ethoxy groups bonded to silicon. Tetraethoxysilane readily undergoes hydrolysis and condensation reactions, making it particularly useful for preparing silica, siloxane networks, porous materials, coatings, nanoparticles, and silicon-containing thin films.

Because of its controllable sol-gel chemistry and high silicon content, Tetraethoxysilane is widely used in materials science, nanotechnology, semiconductor processing, surface engineering, and inorganic synthesis.

 

Mechanism / Principle

Hydrolysis

Tetraethoxysilane reacts with water under suitable acidic or basic conditions to form silanol groups:

Si(OC₂H₅)₄ + H₂O → Si–OH + C₂H₅OH

The degree and rate of hydrolysis depend on factors such as:

  • Water-to-silane ratio
  • pH
  • Solvent
  • Temperature
  • Catalyst
  • Reaction time

Condensation

The generated silanol groups undergo condensation to form Si–O–Si bonds:

Si–OH + HO–Si → Si–O–Si + H₂O

or:

Si–OH + Si–OR → Si–O–Si + ROH

Continuous hydrolysis and condensation ultimately generate a three-dimensional siloxane/silica network.

This reaction mechanism is the basis for many sol-gel synthesis and silica-material fabrication processes.

 

Key Research Applications

1. Sol-Gel Synthesis

Tetraethoxysilane is one of the most commonly used precursors for sol-gel processing.

Applications include:

  • Silica gel synthesis
  • Xerogel preparation
  • Aerogel preparation
  • Porous silica materials
  • Silica coatings
  • Hybrid sol-gel materials

 

2. Silica Nanoparticle Synthesis

Tetraethoxysilane is widely used as a silicon precursor for preparing silica nanoparticles.

Applications include:

  • SiO₂ nanoparticles
  • Mesoporous silica
  • Core-shell particles
  • Functionalized silica
  • Nanostructured silica
  • Drug-delivery materials

 

3. Semiconductor Materials

High-purity Tetraethoxysilane can serve as a precursor for silicon oxide deposition and other silicon-containing materials.

Applications include:

  • SiO₂ thin films
  • Dielectric layers
  • Semiconductor processing
  • Microelectronics
  • Wafer processing
  • Thin-film deposition

TEOS-based deposition processes are used to produce silicon oxide films in semiconductor and microelectronics applications.

 

4. Surface Coatings

Tetraethoxysilane can form silica-based networks on various substrates.

Applications include:

  • Protective coatings
  • Glass coatings
  • Optical coatings
  • Anti-corrosion coatings
  • Hard coatings
  • Functional surfaces

 

5. Organic–Inorganic Hybrid Materials

Tetraethoxysilane can be combined with organic precursors to prepare hybrid materials.

Applications include:

  • Organic–inorganic hybrids
  • Hybrid coatings
  • Functional nanocomposites
  • Sol-gel polymers
  • Advanced materials

 

6. Porous Materials

By controlling hydrolysis and condensation conditions, Tetraethoxysilane can be used to prepare silica materials with tailored porosity.

Applications include:

  • Mesoporous silica
  • Porous coatings
  • Adsorbent materials
  • Catalytic supports
  • Separation materials

 

7. Surface Functionalization

Tetraethoxysilane can provide a silica-based platform for subsequent surface functionalization.

Applications include:

  • Silica surface engineering
  • Functional nanoparticle preparation
  • Biomaterial modification
  • Chemical sensors
  • Catalytic interfaces

 

Advantages

  • High-purity silicon precursor
  • Excellent precursor for SiO₂ formation
  • Well-established sol-gel chemistry
  • Suitable for silica nanoparticle synthesis
  • Applicable to porous silica materials
  • Useful for thin-film deposition
  • Suitable for semiconductor research
  • Compatible with organic–inorganic hybrid systems
  • Useful for surface and coating applications
  • Available in multiple research and electronic-material grades

 

Storage & Handling

  • Store in a tightly closed container.
  • Protect from excessive moisture and water.
  • Store in a cool, dry and well-ventilated area.
  • Minimize exposure to atmospheric humidity.
  • Use dry equipment and containers when appropriate.
  • Follow the supplier-recommended storage conditions.
  • Handle in a suitable fume hood.
  • Avoid contact with skin and eyes.
  • Wear appropriate gloves, protective clothing, and eye protection.
  • Keep away from heat and ignition sources.
  • Follow the product-specific SDS for detailed storage, handling, transportation, and disposal requirements.

Tetraethoxysilane can undergo hydrolysis in the presence of water. TCI recommends storing the material under inert gas in a cool and dark location. (tcichemicals.com)

 

Research Areas

Tetraethoxysilane (CAS No. 78-10-4) is widely used in:

  • Materials science
  • Sol-gel chemistry
  • Nanotechnology
  • Semiconductor manufacturing
  • Microelectronics
  • Surface chemistry
  • Silica synthesis
  • Nanoparticle research
  • Thin-film deposition
  • Coatings
  • Photonics
  • Catalysis
  • Biomaterials
  • Polymer and hybrid materials

FAQ

Q1: What is Tetraethoxysilane?

A: Tetraethoxysilane is a silicon alkoxide with CAS No. 78-10-4, molecular formula C₈H₂₀O₄Si, and molecular weight 208.33 g/mol.

 

Q2: Is Tetraethoxysilane the same as TEOS?

A: Yes. Tetraethoxysilane and Tetraethyl orthosilicate (TEOS) are names for the same compound, CAS 78-10-4.

 

Q3: What is Tetraethoxysilane used for?

A: It is primarily used as a silicon and silica precursor for sol-gel synthesis, silica nanoparticles, porous silica, coatings, thin films, and semiconductor materials.

 

Q4: What is the molecular formula of Tetraethoxysilane?

A: The molecular formula is C₈H₂₀O₄Si.

 

Q5: What is the molecular weight of Tetraethoxysilane?

A: The molecular weight is 208.33 g/mol.

 

Q6: Can Tetraethoxysilane be used to prepare silica nanoparticles?

A: Yes. Tetraethoxysilane is one of the most widely used silicon precursors for preparing silica nanoparticles and mesoporous silica.

 

Q7: Is Tetraethoxysilane used in semiconductor manufacturing?

A: Yes. High-purity Tetraethoxysilane can be used as a silicon precursor for silicon oxide thin films and dielectric materials in semiconductor processing.

 

Q8: Is Tetraethoxysilane moisture sensitive?

A: Tetraethoxysilane undergoes hydrolysis in the presence of water, so exposure to moisture should be minimized during storage and handling.

 

Q9: What is the difference between Tetraethoxysilane and Tetramethoxysilane?

A: Tetraethoxysilane contains four ethoxy groups, while Tetramethoxysilane contains four methoxy groups. Both are silicon alkoxide precursors, but their hydrolysis and condensation behavior can differ.

References Data Source From Pubchem

Chemoselective Probes for Profiling of Carboxylic Acid Metabolites in Biological Tissue

Publication Name: Chromatographia
Publication Date: 2026-03-04
DOI: 10.1007/s10337-026-04485-0

Optimisation of silica-cork aerogel composites for efficient fire-retardant thermoacoustic barrier

Publication Name: Journal of Sol-Gel Science and Technology
Publication Date: 2026-03-04
DOI: 10.1007/s10971-026-07120-4

Construction of Ni-GaOx Sites on Hierarchical Porous SBA-15 Support for Propane Dehydrogenation

Publication Name: Catalysis Letters
Publication Date: 2026-03-04
DOI: 10.1007/s10562-026-05319-2