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Tetrakis(dimethylamino)titanium(IV), 99% TDMAT (99.99%-Ti) PURATREM|22-2240|3275-24-9

Tetrakis(dimethylamino)titanium(IV), 99% TDMAT (99.99%-Ti) PURATREM

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Sku SC22-2240_5_G
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Product Information

Product Name
Tetrakis(dimethylamino)titanium(IV), 99% TDMAT (99.99%-Ti) PURATREM
Brand Name
US-Strem
Product Number
22-2240
CAS
3275-24-9
Certificate of Analysis (COA)​
COA not found

General Information

PubChem CID
123185
IUPAC Name
tetrakis(dimethylazanide);titanium(4+)
InChI Key
MNWRORMXBIWXCI-UHFFFAOYSA-N
SMILES
CN-C.CN-C.CN-C.CN-C.Ti+4

Description

Technical Notes:
1.ALD/CVD precursor mainly used for TiN 1, review and TiO2 based thin film depositions.
References:
1.J. Appl. Phys. 2013 1 13 021301 2

2.Microelectron Eng.2009 86 72.
3.J. Vac. Sci Tech. A. 2018 36 06A105.
4.Appl Surf. Sci 2018 462 1029.

References Data Source From Pubchem

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DOI: 10.1038/s41528-025-00428-1

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Publication Name: Advanced Fiber Materials
Publication Date: 2025-03-28
DOI: 10.1007/s42765-025-00532-x

Effect of Deposition and Annealing Temperatures on the Phase Composition of TiO2 Films Obtained by Atomic Layer Deposition from Titanium Tetrachloride and Water
Publication Name: Journal of Structural Chemistry
Publication Date: 2025-02
DOI: 10.1134/s0022476625020088

Analytic modeling and validation of strain in textile-based OLEDs for advanced textile display technologies
Publication Name: npj Flexible Electronics
Publication Date: 2024-10-30
DOI: 10.1038/s41528-024-00361-9