Product Name
Hexamethyldisiloxane, 97+% HMDSO
Certificate of Analysis (COA)
IUPAC Name
trimethyl(trimethylsilyloxy)silane
InChI Key
UQEAIHBTYFGYIE-UHFFFAOYSA-N
SMILES
CSi(C)(C)OSi(C)(C)C
Technical Notes：
1.Organosilicon precursor used in the plasma- enhanced chemical vapour deposition (PECVD) process of super hydrophobic C-rich polymeric (silicone-like, SiCx yOz) and doped semiconducting SiOẞfilms and coatings 1-7.
References:
1.Appl. Surf. Sci., 2010, 256, 2509
2.J. Phys. Chem. c, 2011, 115, 22225
3.Appl. Surf. Sci., 2011, 257, 3786
4.RSC Adv., 2014, 4, 45442
5.Thin Solid Films, 2015, 590, 299
6.Surf. Coat. Tech., 2016, 225
7.Nanomaterials, 2018, 8, 530
