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Sku SC13-4500_1_G
US-Strem
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Product Information

Product Name
Hexakis(dimethylamino)dialuminum 98% (99.9%-Al) TDMAA
Brand Name
US-Strem
Product Number
13-4500
CAS
32093-39-3
Certificate of Analysis (COA)​
COA not found

Application

Technical Notes:
1. An overlooked atomic layer deposition precursor.
2. Stoichiometric and catalytic Si-N bond formation using the p-block base TDMAA.
References:
1. Journal of Vacuum Science & Technology, A: Vacuum, Surfaces and Films, 2017, 35, 01B1 28/1. 2. Dalton Transactions, 2015, 44, 12112.