$194.00

FREE
SHIPPING

100% MONEY
BACK GUARANTEE

ONLINE
SUPPORT 24/7

Available on backorder. No lead time available. Please request a quote.
Sku SC98-8810_5_G
US-Strem
Get Bulk Quote

Product Information

Product Name
Bis(diethylamino)silane, 99% (99.999%-Si) BDEAS PURATREM
Brand Name
US-Strem
Product Number
98-8810
CAS
27804-64-4
Certificate of Analysis (COA)​
COA not found

Application

Technical Notes:
1.AL D/CVD precursor for Si thin films
References:
1.J. Electrochem. Soc. 2008, 155, G163
2.ECS Transactions, 2011, 35, 191
3.J. Electrochem. Soc 2012. 159, H277
4.Chem. Vap. Deposition 2013 19, 125
5.IEEE Electron Device L ett. 2010, 31, 857
6.J. Vac. Sci. Technol. A, 2015, 33, 01A137
7.C hem. Mater. 2017.29, 4920
8.Plasma Process Polym. 2019, 16, 1 900032
9.Nanotechnology.2021 32. 075706
10.J. Vac. Sci. Technol. A. 2016, 34, 01A136