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Tetrakis(ethylmethylamino)hafnium, 99% (99.99+%-Hf, <0.15% Zr) TEMAH PURATREM|72-7720|352535-01-4

Tetrakis(ethylmethylamino)hafnium, 99% (99.99+%-Hf, <0.15% Zr) TEMAH PURATREM

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Sku SC72-7720_10_G
US-Strem
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Product Information

Product Name
Tetrakis(ethylmethylamino)hafnium, 99% (99.99+%-Hf, <0.15% Zr) TEMAH PURATREM
Brand Name
US-Strem
Product Number
72-7720
CAS
352535-01-4
Certificate of Analysis (COA)​
COA not found

General Information

PubChem CID
4103752
IUPAC Name
ethyl(methyl)azanide;hafnium(4+)
InChI Key
NPEOKFBCHNGLJD-UHFFFAOYSA-N
SMILES
CCN-C.CCN-C.CCN-C.CCN-C.Hf+4

Description

Technical Notes:
1. ALD/CVD precursor for Hf thin film deposition.
References:
1.Chem. Mater. 2002, 14, 4350.
2.Chem. Vap. Deposition 2002. 8 1 99.
3.J. Electrochem. Soc. 2005, 152, G213.
4.Chem. Mater.2004, 16, 3497 .