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Sku SC22-2240_5_G
US-Strem
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Product Information

Product Name
Tetrakis(dimethylamino)titanium(IV), 99% TDMAT (99.99%-Ti) PURATREM
Brand Name
US-Strem
Product Number
22-2240
CAS
3275-24-9
Certificate of Analysis (COA)​
COA not found

Application

Technical Notes:
1.ALD/CVD precursor mainly used for TiN [1, review] and TiO2 based thin film depositions.
References:
1.J. Appl. Phys. 2013 1 13 021301 2

2.Microelectron Eng.2009 86 72.
3.J. Vac. Sci Tech. A. 2018 36 06A105.
4.Appl Surf. Sci 2018 462 1029.