Bis(diethylamino)silane, 99% (99.999%-Si) BDEAS PURATREM

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Sku SC98-8810_5_G
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General Details
CAS # 27804-64-4
SMILES
Chemical Purity
Molecular Formula SiH2[N(CH2CH3)2]2
Chemical Formula
Formula Weight 174.36
Reaction
Note
Physical Properties
Purity 99% (99.999%-Si)
Density
Melting Point
Boiling Point
Flash Point
Vapor Pressure
Surface Area
Pore Volume
Specific Rotation
Shipping & Stability
Safety Yes
Days to Ship
Store Cold
Dry Ice
Alternative Product for Air Shipment
Export Limitations
Pyrophoric
Hygroscopic
Air Sensitive
Light Sensitive
Heat Sensitive
Moisture Sensitive
Odorous Material

Technical Notes:
1.AL D/CVD precursor for Si thin films
References:
1.J. Electrochem. Soc. 2008, 155, G163
2.ECS Transactions, 2011, 35, 191
3.J. Electrochem. Soc 2012. 159, H277
4.Chem. Vap. Deposition 2013 19, 125
5.IEEE Electron Device L ett. 2010, 31, 857
6.J. Vac. Sci. Technol. A, 2015, 33, 01A137
7.C hem. Mater. 2017.29, 4920
8.Plasma Process Polym. 2019, 16, 1 900032
9.Nanotechnology.2021 32. 075706
10.J. Vac. Sci. Technol. A. 2016, 34, 01A136