Bis(t-butylacetoacetato)copper(II), 99%

$693.00
Technical Notes:1.A new, non-fluorinated, copper CVD precursor exhibiting a higher sublimation rate and lower de composition rate than 2.Copper CVD precursor used in the deposition of copper films with low...

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Sku: 29-7110-25G
STREM
Technical Notes:
1.A new, non-fluorinated, copper CVD precursor exhibiting a higher sublimation rate and lower de composition rate than
2.Copper CVD precursor used in the deposition of copper films with low carbon content
References:
1.J.Mater. Res.. 1998. 13, 687
2.Surface and Coating Technology, 2002, 150, 205.