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Sku 29-7110-25G
STREM
| Technical Notes: 1.A new, non-fluorinated, copper CVD precursor exhibiting a higher sublimation rate and lower de composition rate than 2.Copper CVD precursor used in the deposition of copper films with low carbon content References: 1.J.Mater. Res.. 1998. 13, 687 2.Surface and Coating Technology, 2002, 150, 205. |
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