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Sku 27-0770-250MG
STREM
| Technical Notes: 1.Liquid cobalt carbonyl based precursor for the growth of cobalt metal and oxide thin films. References: 1.Technical Digest - International Electron Devices Meeting 2003, 501. 2.Solid State Phenom.2007, 124-126, 359. 3.Jap. J. Appl. Phys. 2008, 47, 5396 . 4.J. Mater. Res. 2009, 24, 2705. 5.Thin Solid Films 2009, 517, 2855 . 6.Chem. Mater. 2011, 23, 8, 2068. 7.Electrochem. Solid-State L ett.2012, 15, D14. 8.Surf. Coat. Tech. 2014, 259, 98 9.J Alloy. Compd. 2018, 758, 116. 10.Materials Today: Proceedings 2019, 8, 582 11. J. Vac. Sci. Technol. A, 2019, 37, 041 506. |
