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Sku SC93-2240_25_G
US-Strem
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Product Information

Product Name
Tetrakis(dimethylamino)titanium(IV), 99% TDMAT
Brand Name
US-Strem
Product Number
93-2240
CAS
3275-24-9
Certificate of Analysis (COA)​
COA not found

Application

Technical Notes:
1.ALD/CVD precursor mainly used for TiN [1 ,review] and TiO2 based thin film de positions .
References:
1.J.Appl Phys. 2013 113. 021301.
2.Microelectron Eng 2009 86 72
3.J Vac. Sci Tech A 2018 36 06A105
4.Appl Surf Sci 2018 462. 1029
5.J App. Phys. 2007. 102. 083521
6.J Electrochem. Soc. 2008 155. H688.