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Bis(diethylamino)silane, 99% (99.999%-Si) BDEAS PURATREM
$190.00
Technical Notes:1.AL D/CVD precursor for Si thin films References:1.J. Electrochem. Soc. 2008, 155, G1632.ECS Transactions, 2011, 35, 1913.J. Electrochem. Soc 2012. 159, H2774.Chem. Vap. Deposition 2013 19, 1255.IEEE Electron Device L...
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Sku: 98-8810-5G
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STREM
Technical Notes: 1.AL D/CVD precursor for Si thin films References: 1.J. Electrochem. Soc. 2008, 155, G163 2.ECS Transactions, 2011, 35, 191 3.J. Electrochem. Soc 2012. 159, H277 4.Chem. Vap. Deposition 2013 19, 125 5.IEEE Electron Device L ett. 2010, 31, 857 6.J. Vac. Sci. Technol. A, 2015, 33, 01A137 7.C hem. Mater. 2017.29, 4920 8.Plasma Process Polym. 2019, 16, 1 900032 9.Nanotechnology.2021 32. 075706 10.J. Vac. Sci. Technol. A. 2016, 34, 01A136 |