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STREM
| Technical Notes 1.Organometallic precursor for chemical vapour deposition (CVD) of Pt films [1-3] References: 1.Chem. Vap. Deposition, 2003, 9, 321. 2.Jpn. J. Appl. Phys., 2004, 43, L624. 3.J. Vac. Sci. Technol. A, 2007, 25, 104. |
