(t-Butylimido)tris(ethylmethylamino)tantalum(V), (99.99%-Ta) PURATREM TBTEMT

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Sku 73-0735-25G
STREM
Technical Notes:.
1.Used for the synthesis of tantalum amido-, imido-, guanidinato precursors for AL D/CVD precursors [3-5].
2.ALD/CVD precursor forTa thin film deposition.
References:
1.Dalton Trans. 2005 3051
2.J .Chem Eng Data 2014 59 4179.
3.Dalton Trans 2006 121.
4.Eur J Inorg. Chem. 2006 4665
5.Chem Vap. Deposition 2007 13 77.
6.Appl Phys. Lett 2007 90 102101 .
7.Appl Phys Lett 2007. 90112912.
8.Nano. Lett 201616 276.
9.Sustainable Energy Fuels, 20204 2293.