$53.00

FREE
SHIPPING

100% MONEY
BACK GUARANTEE

ONLINE
SUPPORT 24/7

Available on backorder. No lead time available. Please request a quote.
Sku 14-1530-5G
STREM
Technical Notes:
1. Used in the chemical vapor deposition of silicon nitride films, and also, the atomic layer deposition of SiN.Cy dielectric sealing layers using plas ma-enhanced atomic layer deposition (P
.2.Used as a reagent for silylation.

References:
1.AIP Conference Proceedings, 2015, 1649(1, Irago Conference 2014), 41.
2.Materials Science in Semiconductor 3.Processing 2015, 29, 139.
4.Applied Surface Science, 2010, 257(4). 1 196.
5.Surface and Coatings Technology. 2008, 202(9), 1606.
6.Microelectronic Engineering, 1991. 13(1-4), 4
7.Joural of Vacuum Science & Technology, B: Microelectronics and Nanometer Structures, 1990, 8(6), 1481.